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Volumn 101, Issue 1, 1988, Pages 37-40
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Selective dissolution of thin AsxS100-x films
a
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Author keywords
[No Author keywords available]
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Indexed keywords
FILMS - SOLUBILITY;
PHOTORESISTS;
AMORPHOUS ARSENIC-SULFUR COMPOUNDS;
ARSENIC SULFATE GLASSES;
THIN FILM DISSOLUTION;
ARSENIC COMPOUNDS;
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EID: 0023995897
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-3093(88)90366-3 Document Type: Article |
Times cited : (14)
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References (12)
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