An approximate analysis of stresses in multilayered elastic thin films

Journal of Applied Mechanics, Transactions ASME

Volumn 55, Issue 1, 1988, Pages 143-148

  Suhir, E ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS - STRUCTURE;

MULTILAYERED ELASTIC THIN FILMS; PEELING STRESSES; SINGLE-LAYERED STRUCTURE; STRESS ANALYSIS MODEL; THERMALLY INDUCED STRESSES;

STRESSES;

EID: 0023984412     PISSN: 00218936     EISSN: 15289036     Source Type: Journal    
DOI: 10.1115/1.3173620     Document Type: Article

References (11)

1. Freund, L. B., 1981, “Shear Stress at a Film-Substrate Interface Due to a Differential Thermal Strain,” Division of Engineering, Brown University, Providence, RI, unpublished.
2. Luryi, S., and Suhir, E., 1986, “New Approach to the High Quality Epitaxial Growth of Lattice-Mismatched Materials,” Applied Physics Letters, Vol. 49, No. 3, pp. 140-142.
3. Olsen, G. H., and Ettenberg, M., 1977, “Calculated Stresses in Multilayered Heteroepitaxial Structures,” Journal of Applied Physics, Vol. 48, No. 6, pp. 2543-2547.
4. Reinhart, F. K., and Logan, R. A., 1973, “Interface Stress of AlxGaj _xAs-GaAs Layer Structures,” Journal of Applied Physics, Vol. 44, No. 7, pp. 3171-3175.
5. Röll, K., 1976, “Analysis of Stress and Strain Distribution in Thin Films and Substrates,” Journal of Applied Physics, Vol. 47, No. 7, pp. 3224-3229.
6. Stoney, G. G., 1909, “The Tension of Metallic Films Deposited by Electrolysis,” Royal Soc. Proc, A82, London, pp. 172-175.
7. Suhir, E., 1986, “Stresses in Bi-Metal Thermostats,” ASME JOURNAL OF APPLIED MECHANICS, Vol. 53, pp. 657-660.
8. Suhir, E., 1986, “Stresses in Adhesively Bonded Assemblies Used in Electronic Packaging,” Mat. Res. Soc. Symp. Proc, Vol. 72, “Electronic Packaging Materials Science I I, “ pp. 133-138.
9. Suhir, E., 1986, “Calculated Thermally Induced Stresses in Adhesively Bonded and Soldered Assemblies,” Int. Symp. on Microelectronics Proc, Atlanta, GA, Oct. 1986, pp. 383-392.
10. Suhir, E., 1986, “Calculated Stresses in Shear Joints,” Presentation at ASME 1986 WAM, Boston, MA, Dec. 1986, unpublished.
11. Vilms, L., and Kerps, D., 1982, “Simple Stress Formula for Multilayered Thin Films on a Thick Substrate,” Journal of Applied Physics, Vol. 53, No. 3, pp. 1536-1537.