REAGENT CONCENTRATION MEASUREMENTS IN METAL ORGANIC VAPOUR PHASE EPITAXY (MOVPE) USING AN ULTRASONIC CELL.

Chemtronics

Volumn 3, Issue 1, 1988, Pages 44-49

  Stagg, J P ^a  

^a NORTEL NETWORKS   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC VARIABLES MEASUREMENT; CRYSTALS - EPITAXIAL GROWTH; SEMICONDUCTING GALLIUM COMPOUNDS - GROWTH; SEMICONDUCTING ORGANIC COMPOUNDS - GROWTH; ULTRASONICS - VELOCITY MEASUREMENT;

ACOUSTIC ANALYSIS; METAL ORGANIC VAPOR PHASE EPITAXY; TRIMETHYL GALLIUM; TRIMETHYL INDIUM; ULTRASONIC CELL;

SEMICONDUCTOR MATERIALS;

EID: 0023978157     PISSN: 02675900     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (25)