메뉴 건너뛰기




Volumn 35, Issue 2, 1988, Pages 203-222

Determination of Si-SiO2 Interface Recombination Parameters Using a Gate-Controlled Point-Junction Diode Under Illumination

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DIODES - JUNCTIONS;

EID: 0023961305     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.2441     Document Type: Article
Times cited : (187)

References (40)
  • 1
    • 33748621800 scopus 로고
    • Statistics of the recombination of holes and electrons
    • W. Shockley and W. T. Read, Jr., “Statistics of the recombination of holes and electrons,” Phys. Rev., vol. 87, no. 5, pp. 835-842, 1952.
    • (1952) Phys. Rev. , vol.87 , Issue.5 , pp. 835-842
    • Shockley, W.1    Read, W.T.2
  • 2
    • 49949136852 scopus 로고
    • Surface effects on p-n junctions; Characteristics of surface space-charge regions under non-equilibrium conditions
    • A. S. Grove and D. J. Fitzgerald, “Surface effects on p-n junctions; Characteristics of surface space-charge regions under non-equilibrium conditions,” Solid-State Electron., vol. 9, pp. 783-806, 1966.
    • (1966) Solid-State Electron. , vol.9 , pp. 783-806
    • Grove, A.S.1    Fitzgerald, D.J.2
  • 3
    • 0000617308 scopus 로고
    • Surface recombination in semiconductors
    • D. J. Fitzgerald and A. S. Grove, “Surface recombination in semiconductors,” Surface Sci., vol. 9, pp. 347-369, 1968.
    • (1968) Surface Sci. , vol.9 , pp. 347-369
    • Fitzgerald, D.J.1    Grove, A.S.2
  • 4
    • 0020748891 scopus 로고
    • The base current recombining at the oxidized silicon surface
    • M. W. Hillen and J. Holsbrink, “The base current recombining at the oxidized silicon surface,” Solid-State Electron., vol. 26, no. 5, pp. 453-463, 1983.
    • (1983) Solid-State Electron. , vol.26 , Issue.5 , pp. 453-463
    • Hillen, M.W.1    Holsbrink, J.2
  • 6
    • 0016345841 scopus 로고
    • The gate-controlled diode s0 measurement and steady-state lateral current flow in deeply depleted MOS structures
    • R. F. Pierret, “The gate-controlled diode s0 measurement and steady-state lateral current flow in deeply depleted MOS structures,” Solid-State Electron., vol. 17, pp. 1257-1269, 1974.
    • (1974) Solid-State Electron. , vol.17 , pp. 1257-1269
    • Pierret, R.F.1
  • 7
    • 0020311613 scopus 로고
    • Limitations of the open circuit voltage of induced junction silicon solar cells due to surface recombination
    • R. Girisch, R. P. Mertens, and R. Van Overstraeten, “Limitations of the open circuit voltage of induced junction silicon solar cells due to surface recombination,” in Proc. 4th EC Photovoltaic Solar Energy Conf., pp. 643-647, 1982; also, in Proc. 16th IEEE Photovoltaic Specialists Conf., pp. 1231-1236, 1982.
    • (1982) Proc. 4th EC Photovoltaic Solar Energy Conf. , pp. 643-647
    • Girisch, R.1    Mertens, R.P.2    Van Overstraeten, R.3
  • 8
    • 0023435081 scopus 로고
    • A new method to determine Si/SiO 2 interface recombination parameters using a gate-controlled point-junction diode under illumination
    • R. Girisch, R. P. Mertens, and R. F. De Keersmaecker, “A new method to determine Si/SiO 2 interface recombination parameters using a gate-controlled point-junction diode under illumination,” presented at the INFOS Conf. 1987; also, Appl. Surface Sci., in press.
    • (1987) presented at the INFOS Conf. 1987; also
    • Girisch, R.1    Mertens, R.P.2    De Keersmaecker, R.F.3
  • 9
    • 0022043074 scopus 로고
    • Probing the minority-carrier quasi-Fermi level in epitaxial Schottky-barrier diodes
    • L. F. Wagner and C. T. Chuang, “Probing the minority-carrier quasi-Fermi level in epitaxial Schottky-barrier diodes,” IEEE Trans. Electron Devices, vol. ED-32, no. 4, pp. 753-757, 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED-32 , Issue.4 , pp. 753-757
    • Wagner, L.F.1    Chuang, C.T.2
  • 11
    • 0002956604 scopus 로고
    • Density of SiO 2 -Si interface states
    • P. V. Gray and D. M. Brown, “Density of SiO 2 -Si interface states,” Appl. Phys. Lett., vol. 8, no. 2, pp. 31-33, 1966.
    • (1966) Appl. Phys. Lett. , vol.8 , Issue.2 , pp. 31-33
    • Gray, P.V.1    Brown, D.M.2
  • 12
    • 84939383977 scopus 로고
    • The Si-SiO 2 interface-Electrical properties as determined by the metal-insulator-silicon conductance technique
    • E. H. Nicollian and A. Goetzberger, “The Si-SiO 2 interface-Electrical properties as determined by the metal-insulator-silicon conductance technique,” Bell Syst. Tech. J., vol. 46, no. 6, pp. 1055-1133, 1967.
    • (1967) Bell Syst. Tech. J. , vol.46 , Issue.6 , pp. 1055-1133
    • Nicollian, E.H.1    Goetzberger, A.2
  • 14
    • 0014868585 scopus 로고
    • Determination of interface-state density and mobility ratio in silicon surface inversion layers
    • H. Sakaki, K. Hoh, and T. Sugano, “Determination of interface-state density and mobility ratio in silicon surface inversion layers,” IEEE Trans. Electron Devices, vol. ED-17, pp. 892-896, 1970.
    • (1970) IEEE Trans. Electron Devices , vol.ED-17 , pp. 892-896
    • Sakaki, H.1    Hoh, K.2    Sugano, T.3
  • 15
    • 0019229828 scopus 로고
    • Recombination velocity at grain boundaries in polycrystalline Si under optical illumination
    • P. Panayotatos and H. C. Card, “Recombination velocity at grain boundaries in polycrystalline Si under optical illumination,” IEEE Electron Device Lett., vol. EDL-1, no. 12, pp. 263-266, 1980.
    • (1980) IEEE Electron Device Lett. , vol.EDL-1 , Issue.12 , pp. 263-266
    • Panayotatos, P.1    Card, H.C.2
  • 17
    • 84916362747 scopus 로고
    • Distribution of surface state density related to diffusion-induced dislocations near the junction formed by diffusion of phosphorus in silicon
    • M. Nishida, “Distribution of surface state density related to diffusion-induced dislocations near the junction formed by diffusion of phosphorus in silicon,” Japan. J. Appl. Phys., vol. 11, no. 5, pp. 673-677, 1972.
    • (1972) Japan. J. Appl. Phys. , vol.11 , Issue.5 , pp. 673-677
    • Nishida, M.1
  • 18
    • 0016927294 scopus 로고
    • The use of charge pumping currents to measure surface state densities in MOS transistors
    • A. B. M. Elliot, “The use of charge pumping currents to measure surface state densities in MOS transistors,” Solid-State Electron., vol. 19, pp. 241-247, 1976.
    • (1976) Solid-State Electron. , vol.19 , pp. 241-247
    • Elliot, A.B.M.1
  • 19
    • 0019529881 scopus 로고
    • The doped Si/SiO 2 interface
    • J. Snel, “The doped Si/SiO 2 interface,” Solid-State Electron., vol. 24, pp. 135-139, 1981.
    • (1981) Solid-State Electron. , vol.24 , pp. 135-139
    • Snel, J.1
  • 21
    • 0018455969 scopus 로고
    • Models for computer simulation of complete IC fabrication process
    • D. A. Antoniadis and R. W. Dutton, “Models for computer simulation of complete IC fabrication process,” IEEE Trans. Electron Devices, vol. ED-26, no. 4, pp. 490-500, 1979.
    • (1979) IEEE Trans. Electron Devices , vol.ED-26 , Issue.4 , pp. 490-500
    • Antoniadis, D.A.1    Dutton, R.W.2
  • 22
    • 0017271820 scopus 로고
    • Origin of interface states and oxide charges generated by ionizing radiation
    • C. T. Sah, “Origin of interface states and oxide charges generated by ionizing radiation,” IEEE Trans. Nuclear Sci., vol. NS-23, no. 6, pp. 1563-1568, 1976.
    • (1976) IEEE Trans. Nuclear Sci. , vol.NS-23 , Issue.6 , pp. 1563-1568
    • Sah, C.T.1
  • 23
    • 0000412893 scopus 로고
    • Electronic states at the silicon-silicon dioxide interface
    • Y. C. Cheng, “Electronic states at the silicon-silicon dioxide interface,” Progress in Surface Sci., vol. 8, pp. 181-218, 1977.
    • (1977) Progress in Surface Sci. , vol.8 , pp. 181-218
    • Cheng, Y.C.1
  • 24
    • 0014881454 scopus 로고
    • A model for interface states in silicon/silicon dioxide structure
    • Y. C. Cheng, “A model for interface states in silicon/silicon dioxide structure,” Surface Sci., vol. 23, pp. 432-436, 1970.
    • (1970) Surface Sci. , vol.23 , pp. 432-436
    • Cheng, Y.C.1
  • 25
    • 0019397433 scopus 로고
    • A model of interface states and charges at the Si-SiO 2 interface: Its predictions and comparisons with experiments
    • K. L. Nagi and C. T. White, “A model of interface states and charges at the Si-SiO 2 interface: Its predictions and comparisons with experiments,” J. Appl. Phys., vol. 52, no. 1, pp. 320-337, 1981.
    • (1981) J. Appl. Phys. , vol.52 , Issue.1 , pp. 320-337
    • Nagi, K.L.1    White, C.T.2
  • 26
    • 0021422050 scopus 로고
    • Determination of the capture cross sections and degeneracy factor of Si-SiO 2 interface states
    • W. D. Eades and R. M. Swanson, “Determination of the capture cross sections and degeneracy factor of Si-SiO 2 interface states,” Appl. Phys. Lett., vol. 44, no. 10, pp. 988-990, 1984.
    • (1984) Appl. Phys. Lett. , vol.44 , Issue.10 , pp. 988-990
    • Eades, W.D.1    Swanson, R.M.2
  • 27
    • 84941435545 scopus 로고
    • The Mathematical Theory of Electricity and Magnetism
    • J. H. Jeans, The Mathematical Theory of Electricity and Magnetism. London: Cambridge, 1958.
    • (1958) London: Cambridge
    • Jeans, J.H.1
  • 28
    • 77956922672 scopus 로고
    • Shallow impurity states in silicon and germanium
    • W. Kohn, “Shallow impurity states in silicon and germanium,” Solid State Phys., vol. 5, pp. 257-320, 1975.
    • (1975) Solid State Phys. , vol.5 , pp. 257-320
    • Kohn, W.1
  • 29
    • 0008156296 scopus 로고
    • Surface states in silicon from charges in the oxide coating
    • A. Goetzberger, V. Heine, and E. H. Nicollian, “Surface states in silicon from charges in the oxide coating,” Appl. Phys. Lett., vol. 12, no. 3, pp. 95-97, 1968.
    • (1968) Appl. Phys. Lett. , vol.12 , Issue.3 , pp. 95-97
    • Goetzberger, A.1    Heine, V.2    Nicollian, E.H.3
  • 30
    • 0000253266 scopus 로고
    • Nodal hydrogenic wave functions of donors on semiconductor surfaces
    • J. D. Levine, “Nodal hydrogenic wave functions of donors on semiconductor surfaces,” Phys. Rev., vol. 140, no. 2A, pp. 586-589, 1965.
    • (1965) Phys. Rev. , vol.140 , Issue.2 , pp. 586-589
    • Levine, J.D.1
  • 31
    • 0016079664 scopus 로고
    • Electrical characteristics of the Sio 2 -Si interface near midgap and in weak inversion
    • J. A. Cooper, Jr. and R. J. Schwartz, “Electrical characteristics of the Sio 2 -Si interface near midgap and in weak inversion,” Solid-State Electron., vol. 17, pp. 641-654, 1974.
    • (1974) Solid-State Electron. , vol.17 , pp. 641-654
    • Cooper, J.A.1    Schwartz, R.J.2
  • 32
    • 0015732761 scopus 로고
    • Measurement of low densities of surface states at the Si-SiO 2 interface
    • G. Declerck, R. Van Overstraeten, and G. Broux, “Measurement of low densities of surface states at the Si-SiO 2 interface,” Solid-State Electron., vol. 16, pp. 1451-1460, 1973.
    • (1973) Solid-State Electron. , vol.16 , pp. 1451-1460
    • Declerck, G.1    Van Overstraeten, R.2    Broux, G.3
  • 33
    • 0021422584 scopus 로고
    • On the nonequilibrium statistics and small signal admittance of Si-SiO 2 interface traps in the deep-depleted gated-diode structure
    • A. K. Agarwal and M. H. White, “On the nonequilibrium statistics and small signal admittance of Si-SiO 2 interface traps in the deep-depleted gated-diode structure,” J. Appl. Phys., vol. 55, no. 10, pp. 3682-3694, 1984.
    • (1984) J. Appl. Phys. , vol.55 , Issue.10 , pp. 3682-3694
    • Agarwal, A.K.1    White, M.H.2
  • 34
    • 0019080028 scopus 로고
    • Determination of interface-state parameters in a MOS capacitor by DLTS
    • T. J. Tredwell and C. R. Viswanathan, “Determination of interface-state parameters in a MOS capacitor by DLTS,” Solid-State Electron., vol. 23, pp. 1171-1178, 1980.
    • (1980) Solid-State Electron. , vol.23 , pp. 1171-1178
    • Tredwell, T.J.1    Viswanathan, C.R.2
  • 35
    • 0019560221 scopus 로고
    • Temperature and energy dependence of capture cross sections at surface states in Si metal-oxide-semiconductor diodes measured by deep level transient spectroscopy
    • T. Katsube, K. Kakimoto and T. Ikoma, “Temperature and energy dependence of capture cross sections at surface states in Si metal-oxide-semiconductor diodes measured by deep level transient spectroscopy,” J. Appl. Phys., vol. 52, no. 5, pp. 3504-3508, 1981.
    • (1981) J. Appl. Phys. , vol.52 , Issue.5 , pp. 3504-3508
    • Katsube, T.1    Kakimoto, K.2    Ikoma, T.3
  • 36
    • 0021497732 scopus 로고
    • Improvements in the determination of interface state density using deep level transient spectroscopy
    • W. D. Eades and R. M. Swanson, “Improvements in the determination of interface state density using deep level transient spectroscopy,” J. Appl. Phys., vol. 56, no. 6, pp. 1744-1751, 1984.
    • (1984) J. Appl. Phys. , vol.56 , Issue.6 , pp. 1744-1751
    • Eades, W.D.1    Swanson, R.M.2
  • 37
    • 6344286824 scopus 로고
    • Photovoltaic effect in p-n junctions
    • R. L. Cummerow, “Photovoltaic effect in p-n junctions,” Phys. Rev., vol. 95, pp. 16-21, 1954.
    • (1954) Phys. Rev. , vol.95 , pp. 16-21
    • Cummerow, R.L.1
  • 38
    • 0019007029 scopus 로고
    • The superposition principle for homojunction solar cells
    • N. G. Tarr and D. L. Pulfrey, “The superposition principle for homojunction solar cells,” IEEE Trans. Electron Devices, vol. ED-27, no. 4, pp. 771-776, 1980.
    • (1980) IEEE Trans. Electron Devices , vol.ED-27 , Issue.4 , pp. 771-776
    • Tarr, N.G.1    Pulfrey, D.L.2
  • 39
    • 0019057725 scopus 로고
    • Diffusion in ideal cylindrical and spherical junctions-Apparent diffusion length
    • E. L. Heasell, “Diffusion in ideal cylindrical and spherical junctions-Apparent diffusion length,” IEEE Trans. Electron Devices, vol. ED-27, no. 9, pp. 1771-1777, 1980.
    • (1980) IEEE Trans. Electron Devices , vol.ED-27 , Issue.9 , pp. 1771-1777
    • Heasell, E.L.1
  • 40
    • 0022147791 scopus 로고
    • Analytical solution for two-dimensional current injection from shallow p-n junctions
    • P.-J. Chen, K. Misiakos, A. Neugroschel, and F. A. Lindholm, “Analytical solution for two-dimensional current injection from shallow p-n junctions,” IEEE Trans. Electron Devices, vol. ED-32, no. 11, pp. 2292-2296, 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED-32 , Issue.11 , pp. 2292-2296
    • Chen, P.-J.1    Misiakos, K.2    Neugroschel, A.3    Lindholm, F.A.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.