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Volumn 21, Issue 2, 1988, Pages 147-151
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Scanning capacitance microscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC MEASUREMENTS - CAPACITANCE;
PROBES;
CAPACITANCE MODULATION;
CONDUCTING BACKPLANE;
SCANNING CAPACITANCE MICROSCOPY;
SURFACE MICROTOPOGRAPHY;
MICROSCOPIC EXAMINATION;
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EID: 0023960467
PISSN: 00223735
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3735/21/2/003 Document Type: Article |
Times cited : (90)
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References (6)
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