Synthesis of fine AlN powder by vapour-phase reaction

Journal of Materials Science Letters

Volumn 7, Issue 1, 1988, Pages 66-68

  Kimura, Isao ^a   Hotta, Noriyasu ^a   Nukui, Hideki ^a   Saito, Natsukaze ^a   Yasukawa, Saburo ^a  

^a NIIGATA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPIC EXAMINATION - SCANNING ELECTRON MICROSCOPY; X-RAY ANALYSIS;

ALUMINUM NITRIDE; PARTICLE SIZE ANALYSIS; VAPOR PHASE REACTIONS; X-RAY DIFFRACTION;

ALUMINUM COMPOUNDS;

EID: 0023855843     PISSN: 02618028     EISSN: 15734811     Source Type: Journal    
DOI: 10.1007/BF01729918     Document Type: Article

References (7)

1. Rapid Growth of AlN Films by Particle-Precipitation Aided Chemical Vapor Deposition