메뉴 건너뛰기




Volumn 771, Issue , 1987, Pages 186-193

Spin coating and planarization

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES;

EID: 0023642044     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.940325     Document Type: Conference Paper
Times cited : (4)

References (19)
  • 1
    • 0022680469 scopus 로고
    • Wafer Steppers and Lens Options
    • See discussion of depth of focus in the article by P. Burggraaf entitled, March
    • See discussion of depth of focus in the article by P. Burggraaf entitled “Wafer Steppers and Lens Options” in Semiconductor International, March, 1986 on p. 55.
    • (1986) Semiconductor International , pp. 55
  • 5
    • 84957473842 scopus 로고
    • Proceedings of the 3rd Int’l, Santa Clara, Ca., June
    • Proceedings of the 3rd Int’l. IEEE VLSI Multilevel Interconnection Conf., Santa Clara, Ca., June 1986.
    • (1986) IEEE VLSI Multilevel Interconnection Conf.
  • 19
    • 84957506894 scopus 로고    scopus 로고
    • unpublished results
    • R. L. Hartless, unpublished results.
    • Hartless, R.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.