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Volumn 771, Issue , 1987, Pages 186-193
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Spin coating and planarization
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
COATING TECHNIQUES;
CAPILLARY FORCES;
CONFORMAL FILM PROFILES;
PLANARIZATION;
SPIN COATING;
INTEGRATED CIRCUIT MANUFACTURE;
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EID: 0023642044
PISSN: 0277786X
EISSN: 1996756X
Source Type: Conference Proceeding
DOI: 10.1117/12.940325 Document Type: Conference Paper |
Times cited : (4)
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References (19)
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