Structure and physical properties of plasma-grown amorphous hydrogenated carbon films

Thin Solid Films

Volumn 146, Issue 1, 1987, Pages 93-107

  Couderc, P ^a   Catherine, Y ^a  

^a UNIVERSITÉ DE NANTES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS - AMORPHOUS; HYDROGEN; OPTICAL PROPERTIES; PLASMAS - APPLICATIONS; SPECTROSCOPY, RAMAN;

FOURIER TRANSFORM INFRARED SPECTRA;

CARBON;

EID: 0023641799     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(87)90343-9     Document Type: Article

References (36)

1. Proc. 9th Int. Conf. on Amorphous and Liquid Semiconductors
2. Proc. 4th Coll. Int. on Plasma Pulverisation (CIP 82)
3. Chemisorbed hydrogen on a-carbon films
4. “Diamond-like” 3-fold coordinated amorphous carbon
5. Raman Spectrum of Graphite
6. Proc. 8th Int. Vacuum Congr.
7. Calculation of stress in electrodeposits from the curvature of a plated strip
8. Low-stress diamondlike carbon films
9. Hard carbon layers for wear protection and antireflection purposes of infrared devices