High performance electron optical column for testing ICs with submicrometer design rules

Microelectronic Engineering

Volumn 7, Issue 2-4, 1987, Pages 163-172

  Frosien, Jürgen ^a   Plies, Erich ^b  

^a ICT GmbH ^*  (Germany)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC WAVEFORMS - MEASUREMENTS; ELECTRON GUNS; ELECTRON LENSES; MAGNETIC LENSES; SPECTROMETERS;

COMPOUND SPECTROMETER-OBJECTIVE LENS; ELECTRON BEAM TESTING; ELECTRON OPTICAL COLUMN; HEMISPHERICAL RETARDING FIELD SPECTROMETER; LOW VOLTAGE GUN;

INTEGRATED CIRCUITS, VLSI;

EID: 0023604076     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(87)80008-4     Document Type: Article

References (15)

1. Digest of papers
2. Energy broadening in electron beams: A comparison of existing theories and Monte Carlo simulation
3. IEEE