0. 5 MICRON BICMOS TECHNOLOGY.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1987, Pages 838-840

  Momose, H ^a   Cham, K M ^a   Drowley, C I ^a   Grinolds, H R ^a   Fu, H S ^a  

^a HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; LOGIC DEVICES - GATES; SEMICONDUCTOR DEVICES, MOS; TRANSISTORS, BIPOLAR;

BICMOS NAND GATE CIRCUIT; BICMOS TECHNOLOGY; ELECTRON BEAM LITHOGRAPHY; SPICE SIMULATION;

INTEGRATED CIRCUITS, VLSI;

EID: 0023603111     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/iedm.1987.191563     Document Type: Conference Paper

References (3)