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Volumn 7, Issue 4, 1987, Pages 429-450
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Mechanism of plasma polymerization of N-silyl-substituted cyclodisilazane: Structure and properties of polymer film
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Author keywords
IR, GC MS, and P GC examinations; low molecular weight products; mechanism of plasma polymerization; N Silyl substituted cyclodisilazane; surface and thermal properties of polymer film
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Indexed keywords
PLASMAS - APPLICATIONS;
PLASTICS FILMS - STRUCTURE;
POLYMERS - SPECTROSCOPIC ANALYSIS;
INITIATION-REINITIATION;
METHYLENE IODIDE;
N-SILYL-SUBSTITUTED CYCLODISILAZANE;
PLASMA FRAGMENTATION;
MONOMERS;
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EID: 0023594469
PISSN: 02724324
EISSN: 15728986
Source Type: Journal
DOI: 10.1007/BF01030488 Document Type: Article |
Times cited : (20)
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References (24)
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