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Volumn , Issue , 1987, Pages 699-704
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EFFECTS OF IMPURITIES ON FILM QUALITY AND DEVICE PERFORMANCE IN A-SI:H DEPOSITED BY PHOTO-ASSISTED CVD.
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Author keywords
[No Author keywords available]
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Indexed keywords
SEMICONDUCTING FILMS - CHEMICAL VAPOR DEPOSITION;
SEMICONDUCTING SILICON - AMORPHOUS;
SEMICONDUCTOR MATERIALS - DOPING;
ATMOSPHERIC CONTAMINANTS EFFECTS;
HYDROGENATED AMORPHOUS SILICON;
P-I-N SOLAR CELLS;
PHOTO-ASSISTED CVD;
QUANTUM EFFICIENCY;
SOLAR CELLS;
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EID: 0023559669
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (6)
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References (16)
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