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Volumn , Issue , 1987, Pages 699-704

EFFECTS OF IMPURITIES ON FILM QUALITY AND DEVICE PERFORMANCE IN A-SI:H DEPOSITED BY PHOTO-ASSISTED CVD.

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING FILMS - CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON - AMORPHOUS; SEMICONDUCTOR MATERIALS - DOPING;

EID: 0023559669     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (6)

References (16)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.