GAAS HBT LSI/VLSI FABRICATION TECHNOLOGY.

Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Volumn , Issue , 1987, Pages 109-112

  Evans, S ^a   Delaney, J ^a   Fuller, C ^a   Boone, D ^a   Dubberley, C ^a   Hoff, J ^a   Stidham, J ^a   de la Torre, B ^a   Vernon, M ^a   Wdowik, M ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS, DIGITAL - FABRICATION; INTEGRATED CIRCUITS, LSI - FABRICATION; INTEGRATED CIRCUITS, VLSI - FABRICATION; SEMICONDUCTING GALLIUM ARSENIDE;

BIPOLAR HI2L TECHNOLOGY; EMITTER-DOWN TRANSISTOR; METALORGANIC CHEMICAL VAPOR DEPOSITION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0023545984     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)