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Volumn 33, Issue C, 1987, Pages 53-62

Zirconium nitride films prepared by cathodic arc plasma deposition process

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS - WEAR RESISTING; CUTTING TOOLS - COATINGS; NITRIDES - CHEMICAL VAPOR DEPOSITION;

EID: 0023452585     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(87)90176-9     Document Type: Article
Times cited : (98)

References (11)
  • 6
    • 84916797638 scopus 로고    scopus 로고
    • W. D. Sproul, Borg-Warner Corporation, Des Plaines, IL, private communications.
  • 7
    • 84916797637 scopus 로고    scopus 로고
    • M. Sasanoma, U.S. Patent 4,415,421, 1983.
  • 9
    • 84916797636 scopus 로고    scopus 로고
    • Physical and Electronic Industries, Eden Prairie, Mn.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.