Characteristics of titanium arc evaporation processes

Thin Solid Films

Volumn 153, Issue 1-3, 1987, Pages 91-102

  Martin, P J ^a   McKenzie, D R ^b   Netterfield, R P ^a   Swift, P ^b   Filipczuk, S W ^a   Muller K H ^a   Pacey, C G ^a   James, B ^b  

^a CSIRO   (Australia)

^b UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; ELECTRIC ARCS;

CATHODIC ARC EVAPORATOR;

TITANIUM AND ALLOYS;

EID: 0023439496     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(87)90173-8     Document Type: Article

References (36)

1. Formation time and heating mechanism of arc cathode craters in vacuum
2. In Situ Determination of Macroparticle Velocities in a Copper Vacuum Arc
3. Erosion products from the cathode spot region of a copper vacuum arc
4. Characterization of a Ti vacuum arc and the structure of deposited Ti and TiN films
5. Refractive indices of TiO_2 films produced by reactive evaporation of various titanium-oxygen phases