High-Performance Thin-Film Transistors in Low-Temperature Crystallized LPCVD Amorphous Silicon Films

IEEE Electron Device Letters

Volumn 8, Issue 8, 1987, Pages 361-364

  Hatalis, Miltiadis K ^a   Greve, David W ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; SOLID STATE DEVICES, THIN FILM;

AMORPHOUS SILICON; LIQUID-PHASE CHEMICAL VAPOR DEPOSITION SILICON; LPCVD; POLYCRYSTALLINE SILICON FILMS;

TRANSISTORS;

EID: 0023401951     PISSN: 07413106     EISSN: 15580563     Source Type: Journal    
DOI: 10.1109/EDL.1987.26660     Document Type: Article

References (13)

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