Design and assessment of monolithic high precision translation mechanisms

Journal of Physics E: Scientific Instruments

Volumn 20, Issue 8, 1987, Pages 977-983

  Smith, S T ^a   Chetwynd, D G ^a   Bowen, D K ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETS - APPLICATIONS; MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD; MECHANICAL VARIABLES MEASUREMENT - EQUIPMENT; SOLENOIDS - APPLICATIONS;

DISPLACEMENT TRANSDUCERS; HIGH PRECISION TRANSLATION MECHANISMS;

TRANSDUCERS;

EID: 0023401170     PISSN: 00223735     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3735/20/8/005     Document Type: Article

References (18)

1. Comparison of instruments for measuring step heights and surface profiles
2. Scanning tunnelling microscope studies