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Volumn 134, Issue 8, 1987, Pages 2020-2027

Structural and Strain-Related Effects during Growth of SiO2 Films on Silicon

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON - SUBSTRATES; STRAIN; STRESSES;

EID: 0023399194     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2100811     Document Type: Article
Times cited : (46)

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