POLYSILOXANES FOR OPTICAL LITHOGRAPHY.

Solid State Technology

Volumn 30, Issue 6, 1987, Pages 83-89

  Shaw, J ^a   Babich, E ^a   Hatzakis, M ^a   Paraszczak, J ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON COMPOUNDS;

HIGH RESOLUTION LITHOGRAPHY; OPTICAL LITHOGRAPHY; PATTERN TRANSFER; POLYSILOXANES; RIE;

LITHOGRAPHY;

EID: 0023366210     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (25)