Sputter-deposition of [111]-axis oriented rhombohedral PZT films and their dielectric, ferroelectric and pyroelectric properties

Japanese Journal of Applied Physics

Volumn 26, Issue 4 R, 1987, Pages 550-553

  Adachi, Masatoshi ^a   Matsuzaki, Tokuo ^a,b   Yamada, Takehiro ^a   Shiosaki, Tadashi ^a   Kawabata, Akira ^a  

^a KYOTO UNIVERSITY   (Japan)

^b UBE INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES - MEASUREMENTS; PLATINUM AND ALLOYS - SUBSTRATES; PYROELECTRICITY - MEASUREMENTS; SPUTTERING - APPLICATIONS; X-RAYS - DIFFRACTION;

EPITAXIAL FILMS; REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION; RF-MAGNETRON SPUTTERING; RHOMBOHEDRAL PZT FILMS;

FERROELECTRIC MATERIALS;

EID: 0023327254     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.26.550     Document Type: Article

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