Elastic electron backscattering for quantitative elemental analysis of laser diode structures

Surface and Interface Analysis

Volumn 11, Issue 6-7, 1988, Pages 312-316

  Szostak, D J ^a   Thomas, J H ^a  

^a SARNOFF CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS - SCATTERING;

ELASTIC ELECTRON BACKSCATTERING; LASER DIODE STRUCTURES; QUANTITATIVE ELEMENTAL ANALYSIS;

LASERS, SEMICONDUCTOR;

EID: 0023325539     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.740110608     Document Type: Article

References (12)

1. Edge effect in high-resolution scanning Auger-electron microscopy
2. Erratum: Electron backscattering from thin films [J. Appl. Phys. 53, R15 (1982)]
3. Elastic peak electron spectroscopy