LARGE SCALE CHEMICAL VAPOR DEPOSITION.

Volumn 1, Issue , 1987, Pages 623-629

  Goela, J S ^a   Taylor, R L ^a  

^a CVD INC Woburn MA USA ^*

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL EQUIPMENT - REACTORS; FLOW OF FLUIDS - ANALYSIS; SILICON AND ALLOYS - FABRICATION; ZINC AND ALLOYS - FABRICATION;

BOWING; CHEMICAL VAPOR DEPOSITION (CVD); NODULE GROWTH;

METALS AND ALLOYS;

EID: 0023246031     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)