MICRO-DIAPHRAGM PRESSURE SENSOR.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1986, Pages 184-187

  Sugiyama, S ^a   Suzuki, T ^a   Kawahata, K ^a   Shimaoka, K ^a   Takigawa, M ^a   Igarashi, I ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; SEMICONDUCTING SILICON COMPOUNDS - SUBSTRATES;

MICRODIAPHRAGM; POLYSILICON PIEZORESISTORS; SILICON NITRIDE DIAPHRAGM; UNDERCUT ETCHING;

PRESSURE TRANSDUCERS;

EID: 0023014962     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/iedm.1986.191145     Document Type: Conference Paper

References (8)