IMAGING AND DETECTION OF CURRENT CONDUCTION IN DIELECTRIC FILMS BY EMISSION MICROSCOPY.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1986, Pages 672-675

  Chiang, Ching Lang ^a   Khurana, Neeraj ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MEASUREMENTS - CURRENT;

CURRENT MEASUREMENT; DIELECTRIC FILMS; FAULT DIAGNOSIS;

DIELECTRIC MATERIALS;

EID: 0022995102     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)