MICROMACHINED ZnO ON SILICON NITRIDE PRESSURE SENSOR.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1986, Pages 807-808

  Kim, E S ^a   Muller, R S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PIEZOELECTRIC TRANSDUCERS; PRESSURE MEASUREMENT - SENSORS;

MICROMACHINING; SILICON NITRIDE; SUMMARY ONLY; ZINC OXIDE;

PRESSURE TRANSDUCERS;

EID: 0022983334     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/iedm.1986.191319     Document Type: Conference Paper

References (2)