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Volumn , Issue , 1986, Pages 406-414
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EFFECTS OF PROLONGED EXPOSURE OF POLYMERS CONTAINING FLUORINE TO INTEGRATED CIRCUIT PROCESS WATER.
a a
a
NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
WATER POLLUTION;
18 MEGOHM-CM WATER;
DEIONIZED WATER;
ECTFE;
PROLONGED EXPOSURE;
PVDF;
WAFER PROCESSING;
INTEGRATED CIRCUIT MANUFACTURE;
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EID: 0022939886
PISSN: 00739227
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (9)
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