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Volumn 86-4, Issue , 1986, Pages 722-750
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DEFECTS AND DEVICE PROCESSING: ACHIEVEMENTS AND LIMITATIONS.
a
a
IBM
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
INTEGRATED CIRCUIT MANUFACTURE;
DEFECT CONTROL;
DEFECT GENERATION;
DEFECT SUSCEPTIBILITY;
OXIDATION GENERATION;
STRESS LOCALIZATION;
THERMAL STRESSES;
SEMICONDUCTING SILICON;
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EID: 0022893444
PISSN: 01616374
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (2)
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References (0)
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