-
1
-
-
0019436775
-
2 mixtures
-
Jan.
-
R. d'Agostino and D. L. Flamm, “Plasma etching of Si and SiO 2 in SF 6 -0 2 mixtures,” J. Appl. Phys., vol. 52, no. 1, pp. 162–167, Jan. 1981.
-
(1981)
J. Appl. Phys.
, vol.52
, Issue.1
, pp. 162-167
-
-
d'Agostino, R.1
Flamm, D.L.2
-
2
-
-
0000002852
-
DC plasma etching of silicon by sulfur hexafluoride. Mass spectrometric study of the discharge products
-
J. J. Wagner and W. W. Brandt, “DC plasma etching of silicon by sulfur hexafluoride. Mass spectrometric study of the discharge products,” Plasma Chem. Plasma Processing, vol. 1, no. 2, pp. 201-215, 1981.
-
(1981)
Plasma Chem. Plasma Processing
, vol.1
, Issue.2
, pp. 201-215
-
-
Wagner, J.J.1
Brandt, W.W.2
-
3
-
-
84939368008
-
Recent advances in gaseous dielectrics at Oak Ridge National Laboratory
-
Dec.
-
L. G. Christophorou et al. “Recent advances in gaseous dielectrics at Oak Ridge National Laboratory,” IEEE Trans. Elec. Insul., vol. EI-19, no. 6, pp. 550–566, Dec. 1984.
-
(1984)
IEEE Trans. Elec. Insul.
, vol.EI-19
, Issue.6
, pp. 550-566
-
-
Christophorou, L.G.1
-
4
-
-
0022054860
-
6 corona discharges
-
May
-
R. J. Van Brunt, “Production rates for oxyfluorides SOF 2, SO 2 F 2, and SOF 4 in SF 6 corona discharges,” J. Res. Nat. Bur. Stand., vol. 90, no. 3, pp. 229–253, May-June 1985.
-
(1985)
J. Res. Nat. Bur. Stand.
, vol.90
, Issue.3
, pp. 229-253
-
-
Van Brunt, R.J.1
-
5
-
-
0002491261
-
2 mixtures
-
Sept., Oxford, U.K.
-
M. C. Siddagangappa and R. J. Van Brunt, “Decomposition products from corona in SF 6 /N 2 and SF 6 /0 2 mixtures,” in Proc. 8th Int. Conf. Gas Discharges and Their Applications (Oxford, U.K.), Sept. 1985, pp. 247–250.
-
(1985)
Proc. 8th Int. Conf. Gas Discharges and Their Applications
, pp. 247-250
-
-
Siddagangappa, M.C.1
Van Brunt, R.J.2
-
6
-
-
0019399404
-
6, a preferable etchant for plasma-etching silicon
-
Jan.
-
K. M. Eisele, “SF 6, a preferable etchant for plasma-etching silicon,” J. Electrochem. Soc., vol. 128, no. 1, pp. 123–126, Jan. 1981.
-
(1981)
J. Electrochem. Soc.
, vol.128
, Issue.1
, pp. 123-126
-
-
Eisele, K.M.1
-
7
-
-
84939721118
-
Material considerations for a uranium gas-core reactor. Interim report for preliminary design study
-
P. Wagner, “Material considerations for a uranium gas-core reactor. Interim report for preliminary design study,” Los Alamos Sci. Lab., Los Alamos, NM, Rep. LA-6776-MS, 1977.
-
(1977)
Los Alamos Sci. Lab., Los Alamos, NM, Rep. LA-6776-MS
-
-
Wagner, P.1
-
8
-
-
85013690728
-
Studies of galvanic corrosion couples in liquid fluorine
-
Dec.
-
S. M. Toy, W. D. English, and W. E. Crane, “Studies of galvanic corrosion couples in liquid fluorine,” Corrosion, vol. 24, no. 12, pp. 418–421, Dec. 1968.
-
(1968)
Corrosion
, vol.24
, Issue.12
, pp. 418-421
-
-
Toy, S.M.1
English, W.D.2
Crane, W.E.3
-
9
-
-
0005862450
-
Passivation reactions of nickel and copper alloys with fluorine
-
Aug.
-
W. A. Cannon, S. K. Asunmaa, W. D. English, and N. A. Tiner, “Passivation reactions of nickel and copper alloys with fluorine,” Trans. Metal. Soc. AIME, vol. 242, pp. 1635–1643, Aug. 1968.
-
(1968)
Trans. Metal. Soc. AIME
, vol.242
, pp. 1635-1643
-
-
Cannon, W.A.1
Asunmaa, S.K.2
English, W.D.3
Tiner, N.A.4
-
10
-
-
0041137643
-
Mass-spectrometric investigation of the nickel-fluorine surface reaction
-
May
-
J. D. McKinley, “Mass-spectrometric investigation of the nickel-fluorine surface reaction,” J. Chem. Phys., vol. 45, no. 5, pp. 1690–1693, May 1966.
-
(1966)
J. Chem. Phys.
, vol.45
, Issue.5
, pp. 1690-1693
-
-
McKinley, J.D.1
-
11
-
-
84939764136
-
Laboratory investigations in support of fluid-bed fluoride volatility processes. XIV. The corrosion of nickel and nickel alloys by fluorine, uranium hexafluoride and selected volatile fission product fluorides at 500°
-
W. H. Gunther and M. J. Steindler, “Laboratory investigations in support of fluid-bed fluoride volatility processes. XIV. The corrosion of nickel and nickel alloys by fluorine, uranium hexafluoride and selected volatile fission product fluorides at 500°,” U.S. Atomic Energy Comm., Argonne Nat. Lab., Rep. ANL-7241, 1966.
-
(1966)
U.S. Atomic Energy Comm., Argonne Nat. Lab., Rep. ANL-7241
-
-
Gunther, W.H.1
Steindler, M.J.2
-
12
-
-
0344837681
-
Fundamental processes in the electrical breakdown of gases
-
J. M. Meek and J. D. Craggs, Eds.New York: Wiley
-
J. A. Rees, “Fundamental processes in the electrical breakdown of gases,” in Electrical Breakdown of Gases, J. M. Meek and J. D. Craggs, Eds. New York: Wiley, 1978, p. 43.
-
(1978)
Electrical Breakdown of Gases
, pp. 43.
-
-
Rees, J.A.1
-
13
-
-
0019622087
-
Control of contaminants in XeCl lasers
-
Oct.
-
R. Tennant, “Control of contaminants in XeCl lasers,” Laser Focus, vol. 17, no. 10, pp. 65–68, Oct. 1981.
-
(1981)
Laser Focus
, vol.17
, Issue.10
, pp. 65-68
-
-
Tennant, R.1
-
14
-
-
0343852659
-
Negative ions in discharge tubes
-
Jan., sect. A, pp.
-
K. G. Emeleus and J. Sayers, “Negative ions in discharge tubes,” Proc. Roy. Irish Acad., vol. 44, sect. A, pp. 87–100, Jan. 1938.
-
(1938)
Proc. Roy. Irish Acad.
, vol.44
, pp. 87-100
-
-
Emeleus, K.G.1
Sayers, J.2
-
15
-
-
0020241751
-
Corrosion of stainless steel points subjected to the positive glow corona in room air
-
Aug-Sept., London, U.K.
-
R. Le Ny, “Corrosion of stainless steel points subjected to the positive glow corona in room air,” in Proc. 7th Int. Conf. Gas Discharges and Their Applications (London, U.K.), Aug-Sept. 1982, pp. 155–158.
-
(1982)
Proc. 7th Int. Conf. Gas Discharges and Their Applications
, pp. 155-158
-
-
Le, R.1
-
16
-
-
0019601883
-
Spark discharges in iodine vapour
-
Aug., plus five plates
-
D. B. Lewis and G. A. Woolsey, “Spark discharges in iodine vapour,” J. Phys. D: Appl. Phys., vol. 14, no. 8, pp. 1445–1458 (plus five plates), Aug. 1981.
-
(1981)
J. Phys. D: Appl. Phys.
, vol.14
, Issue.8
, pp. 1445-1458 (
-
-
Lewis, D.B.1
Woolsey, G.A.2
-
17
-
-
0018998856
-
Negative d.c. corona study in atmospheric air using Schlieren and interferometric techniques
-
Mar., part A, pp.
-
A. Kurimoto and O. Farish, “Negative d.c. corona study in atmospheric air using Schlieren and interferometric techniques,” Proc. Inst. Elec. Eng., vol. 127, no. 2, part A, pp. 89–94, Mar. 1980.
-
(1980)
Proc. Inst. Elec. Eng.
, vol.127
, Issue.2
, pp. 89-94
-
-
Kurimoto, A.1
Farish, O.2
-
18
-
-
0020114121
-
An interferometric measurement of gas temperatures in corona discharges”
-
Apr.
-
N. G. Douglas, I. S. Falconer, and J. J. Lowke, “An interferometric measurement of gas temperatures in corona discharges,” J. Phys. D: Appl. Phys., vol. 15, no. 4, pp. 665–668, Apr. 1982.
-
(1982)
J. Phys. D: Appl. Phys.
, vol.15
, Issue.4
, pp. 665-668
-
-
Douglas, N.G.1
Falconer, I.S.2
Lowke, J.J.3
-
19
-
-
0015050430
-
6 and their use in a simplified enthalpy flow arc model
-
Apr.
-
L. S. Frost and R. W. Liebermann, “Composition and transport properties of SF 6 and their use in a simplified enthalpy flow arc model,” Proc. IEEE, vol. 59, no. 4, pp. 474–485, Apr. 1971.
-
(1971)
Proc. IEEE
, vol.59
, Issue.4
, pp. 474-485
-
-
Frost, L.S.1
Liebermann, R.W.2
-
20
-
-
84939725305
-
Copper fluorination
-
France, Rep. CEA-R 3212
-
J. Gillardeau, “Copper fluorination,” Commis. Energ. At. Rapp., France, Rep. CEA-R 3212, 1967.
-
(1967)
Commis. Energ. At. Rapp.
-
-
Gillardeau, J.1
-
21
-
-
36549091754
-
+ 2 (N = 1 – 6) using high-pressure swarm techniques
-
May
-
S. R. Hunter and L. G. Christophorou, “Electron attachment to the perfluoroalkanes n-C N F 2N + 2 (N = 1–6) using high-pressure swarm techniques,” J. Chem. Phys., vol. 80, no. 5, pp. 6150–6164, May 1984.
-
(1984)
J. Chem. Phys.
, vol.80
, Issue.5
, pp. 6150-6164
-
-
Hunter, S.R.1
Christophorou, L.G.2
-
22
-
-
36549090689
-
Electron transport studies of gas mixtures for use in e-beam controlled diffuse discharge switches
-
Oct.
-
S. R. Hunter, J. G. Carter, and L. G. Christophorou, “Electron transport studies of gas mixtures for use in e-beam controlled diffuse discharge switches,” J. Appl. Phys., vol. 58, no. 8, pp. 3001–3015, Oct. 1985.
-
(1985)
J. Appl. Phys.
, vol.58
, Issue.8
, pp. 3001-3015
-
-
Hunter, S.R.1
Carter, J.G.2
Christophorou, L.G.3
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