Measurement of Thin-Film Dissolution Kinetics using a Quartz Crystal Microbalance

Journal of the Electrochemical Society

Volumn 133, Issue 7, 1986, Pages 1448-1451

  Hinsberg, W D ^a   Willson, C G ^a   Kanazawa, K K ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

QUARTZ - APPLICATIONS; SCALES AND WEIGHING - PRECISION BALANCES;

OSCILLATION FREQUENCY; POLYMERIC RESIST FILMS; RESIST DISSOLUTION KINETICS;

FILMS;

EID: 0022757059     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2108932     Document Type: Article

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