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Journal of Polymer Science Part A: Polymer Chemistry

Volumn 24, Issue 5, 1986, Pages 955-964

Chain scission efficiency and reactive‐ion etch resistance of alternating copolymers of styrene and olefins trisubstituted or tetrasubstituted with electron‐withdrawing groups

(4) Ito, Hiroshi a Hrusa, Claudia a,c Hall, H K b Padias, Anne B b

a IBM ALMADEN RESEARCH CENTER (United States)

b UNIVERSITY OF ARIZONA (United States)

c Ultratech Stepper Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POLYMETHYL METHACRYLATE; POLYOLEFINS; POLYSTYRENES;

CHAIN SCISSION; ETCH RESISTANCE; GAMMA RADIOLYSIS; LITHOGRAPHIC STUDIES;

COPOLYMERS;

EID: 0022723458 PISSN: 0887624X EISSN: 10990518 Source Type: Journal
DOI: 10.1002/pola.1986.080240513 Document Type: Article

Times cited : (13)

References (43)

1
- 0000882768
- High-resolution Positive Resists for Electron-beam Exposure
- (1968) IBM Journal of Research and Development , vol.12 , pp. 251
- Haller, I.¹ Hatzakis, M.² Srinivasan, R.³

2
- 0020715442
- (1983) Opt. Eng. , vol.22 , pp. 181
- Moreau, W.M.¹

3
- 0019606469
- (1981) J. Electrochem. Soc. , vol.128 , pp. 1758
- Pittman, C.U.¹ Ueda, M.² Chen, C.³ Kuratkowski, J.⁴ Cook, C.⁵ Helbert, J.N.⁶

4
- 84987003968
- U.S. Pat. 3,996,393
- Cortellino, C.A.¹ Gipstein, E.² Hewett, W.A.³ Johnson, D.E.⁴ Moreau, W.M.⁵

5
- 84987025712
- (1976) Chem. Abstr. , vol.84 , pp. 82583

6
- 84914395658
- R. Thornley, San Francisco Press, San Francisco
- (1971) Record of the 11th Symposium on Electron, Ion and Laser Beam Technology , pp. 337-344
- Ting, C.¹

7
- 0016535487
- (1975) J. Electrochem. Soc. , vol.122 , pp. 970
- Greeneich, J.S.¹

8
- 84987004381
- (1973) J. Electrochem. Soc. , vol.118 , pp. 272
- Harris, R.¹

9
- 0018470518
- (1979) J. Appl. Phys. , vol.50 , pp. 3707
- Atoda, N.¹ Komuro, M.² Kawakatsu, H.³

10
- 84986993673
- U. S. Pat. 3,987,215
- Cortellino, C.A.¹

11
- 84986929951
- (1976) Chem. Abstr. , vol.84 , pp. 24441e

12
- 0019898413
- (1982) J. Electrochem. Soc. , vol.129 , pp. 205
- Pederson, L.A.¹

13
- 0019896152
- E. D. Feit, C. Wilkins, Jr., American Chemical Society, Washington, DC
- (1982) Polymer Materials for Electronic Applications, Am. Chem. Soc. Symp. Ser. 184 , pp. 61-72
- Helbert, J.N.¹ Schmidt, M.A.²

14
- 0021730985
- T. Davidson, American Chemical Society, Washington, DC
- (1984) Polymers in Electronics, Am. Chem. Soc. Symp. Ser. 242 , pp. 91-100
- Helbert, J.N.¹ Schmidt, M.A.² Malkiewicz, C.³ Wallace, E.⁴ Pittman, C.U.⁵

15
- 0019080014
- (1980) Polym. Eng. Sci. , vol.20 , pp. 1087
- Wolf, T.¹ Taylor, G.N.²

16
- 0020113316
- (1982) IEEE Trans. Electron Devices , vol.29 ED , pp. 518
- Harada, K.¹ Kogure, O.² Murase, K.³

17
- 0019686043
- (1981) Proc. SPIE , vol.275 , pp. 150
- van Pelt, P.¹

18
- 0018287496
- (1979) J. Electrochem. Soc. , vol.126 , pp. 154
- Haller, I.¹ Feder, R.² Hatzakis, M.³ Spiller, E.⁴

19
- 0018542534
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 2008
- Hatzakis, M.¹ Webb, D.²

20
- 0015570710
- (1973) Am. Chem. Soc. Div. Org. Coat. Prepr. , vol.33 , pp. 359
- Roberts, E.¹

21
- 0020828799
- (1983) J. Vac. Sci. Technol. , vol.1 B , pp. 1062
- Hiraoka, H.¹ Welsh, W.L.² Bargon, J.³

22
- 0021698945
- T. Davidson, American Chemical Society, Washington, DC
- (1984) Polymers in Electronics, Am. Chem. Soc. Symp. Ser. , vol.242 , pp. 11-23
- Ito, H.¹ Wilson, C.G.²

23
- 0019579320
- (1981) J. Electrochem. Soc. , vol.128 , pp. 1304
- Bowden, M.J.¹ Thompson, L.F.² Fahrenholtz, S.R.³ Doerris, E.M.⁴

24
- 0344079235
- (1978) Macromolecules , vol.11 , pp. 617
- Lai, J.H.¹ Helbert, J.H.²

25
- 0020734041
- (1983) Polymer , vol.24 , pp. 387
- Sharma, V.K.¹ Affrossman, S.² Pethrick, R.³

26
- 0003162666
- (1975) Macromolecules , vol.8 , pp. 22
- Hall, H.K.¹ Daly, R.C.²

27
- 0021570802
- L. F. Thompson, C. G. Willson, J. M. J. Frechet, American Chemical Society, Washington, DC
- (1984) Materials for Microlithography, Am. Chem. Soc. Symp. Ser. 266 , pp. 323-338
- Pohl, K.U.¹ Rodriguez, F.² Namaste, Y.M.N.³ Obendorf, S.K.⁴

28
- 0016930283
- (1976) J. Polym. Sci. Polym. Chem. Ed. , vol.14 , pp. 701
- Ouano, A.C.¹ Johnson, D.E.² Dawson, B.³ Pederson, L.A.⁴

29
- 0004250808
- M. Dole, Academic, New York
- (1972) The Radiation Chemistry of Macromolecules

30
- 0001061983
- (1965) J. Phys. Chem. , vol.69 , pp. 828
- Parkinson, W.W.¹ Bopp, C.D.² Binder, D.³ White, J.⁴

31
- 0019571515
- (1981) J. Polym. Sci. Polym. Chem. Ed. , vol.19 , pp. 1167
- Bowmer, T.N.¹ O'Donnell, J.H.² Winzor, D.J.³

32
- 0021557361
- L. F. Thompson, C. G. Willson, J. M. J. Frechet, American Chemical Society, Washington, DC
- (1984) Materials for Microlithography, Am. Chem. Soc. Symp. Ser. 266 , pp. 241-254
- Novembre, A.¹ Bowmer, T.N.²

33
- 0000797130
- The mechanisms of radiation-induced changes in vinyl polymers
- (1960) Journal of Polymer Science , vol.42 , pp. 223
- Todd, A.¹

34
- 0003673462
- Interscience, New York
- (1962) Radiation Chemistry of Polymer Systems
- Chapiro, A.¹

35
- 0017463830
- (1977) IBM J. Res. Dev. , vol.21 , pp. 143
- Gipstein, E.¹ Ouano, A.C.² Johnson, D.E.³ Need, O.U.⁴

36
- 0020938226
- (1983) Polym. Eng. Sci. , vol.23 , pp. 1012
- Ito, H.¹ Willson, C.G.²

37
- 0016352216
- (1974) J. Electrochem. Soc. , vol.121 , pp. 1620
- Bowden, M.J.¹ Thompson, L.F.²

38
- 0003679665
- Pergamon, London
- (1960) Atomic Radiation and Polymers , pp. 135-137
- Charlesby, A.¹

39
- 0018294489
- (1979) J. Polym. Sci. Polym. Chem. Ed. , vol.17 , pp. 49
- Helbert, J.N.¹ Poindexter, E.H.² Stahl, G.A.³ Chen, C.‐Y.⁴ Pittman, C.U.⁵

40
- 0020834133
- (1983) J. Vac. Sci. Technol. , vol.1 B , pp. 1160
- Namaste, Y.M.N.¹ Obendorf, S.K.² Anderson, C.C.³ Krasicky, P.D.⁴ Rodriguez, F.⁵

41
- 0021698380
- T. Davidson, American Chemical Society, Washington, DC
- (1984) Polymers in Electronics, Am. Chem. Soc. Symp. Ser. 242 , pp. 119-127
- Anderson, C.C.¹ Krasicky, P.D.² Rodriguez, F.³ Namaste, Y.⁴ Obendorf, S.K.⁵

42
- 0020497931
- (1983) J. Electrochem. Soc. , vol.130 , pp. 143
- Gokan, H.¹ Esho, S.² Ohnishi, Y.³

43
- 0019633441
- (1981) J. Vac. Sci. Technol. , vol.19 , pp. 1136
- Ohnishi, Y.¹

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