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Volumn 30, Issue 3, 1986, Pages 326-338
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ON YIELD, FAULT DISTRIBUTIONS, AND CLUSTERING OF PARTICLES.
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Author keywords
[No Author keywords available]
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Indexed keywords
PROBABILITY;
STATISTICAL METHODS;
CLUSTERING;
FAULT DISTRIBUTIONS;
MEMORY CHIPS;
SEMICONDUCTOR WAFERS;
WAFER-SCALE INTEGRATION;
INTEGRATED CIRCUITS, VLSI;
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EID: 0022719974
PISSN: 00188646
EISSN: None
Source Type: Journal
DOI: 10.1147/rd.303.0326 Document Type: Article |
Times cited : (116)
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References (16)
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