Integrated Multisensor Chip

IEEE Electron Device Letters

Volumn 7, Issue 4, 1986, Pages 254-256

  Polla, D L ^a   Muller, Richard S ^a   White, Richard M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES, MOS - APPLICATIONS;

INTEGRATED MULTISENSOR CHIP; PYROELECTRIC/PIEZOELECTRIC EFFECTS;

INTEGRATED CIRCUITS, MONOLITHIC;

EID: 0022704482     PISSN: 07413106     EISSN: 15580563     Source Type: Journal    
DOI: 10.1109/EDL.1986.26363     Document Type: Article

References (6)

1. D. L. Polla, R. S. Muller, and R. M. White, “Monolithic integrated zinc-oxide on silicon pYroelectric anemometer,” in Proc. 1983 IEEE Int. Electron Devices Meeting (Washington, DC), Dec. 1983, Abstr. 28.4, pp. 639–642.
2. D. L. Polla, R. S. Muller, and R. M. White; “Fully integrated ZnO on silicon pyroelectric infrared detector array,” in Proc. IEEE Int Electron Devices Meeting (San Francisco, CA), Dec. 1984, Abstr. 14.4.
3. D. L. Po 11a, R. M. White, and R. S. Muller, “Integrated chemical-reaction reaction sensor,” presented at the 3rd Int, Conf, Solid-State Sensors and Actuators, Philadelphia, PA, June 1985.
4. D. L. Po lla, W. T. Chang, R. S. Muller, and R. M. White, “Integrated zinc oxide-on-silicon tactile sensor array,” in Proc. IEEE Int. Electron Devices Meeting (Washington, DC), Dec, 1985, Abstr. 5.7.
5. C. T. Chuang; R. M. White, and J. J. Bernstein, “A thin-membrane surface-acoustic-wave vapor-sensing devibe,” IEEE Electron Device Lett., vol. EDL-3, pp. 145–148, June 1982.
6. P. Chen, R. S. Muller, R. D: Jolly, G. L. Ha lac, R. M. White, A. P. Andrews, T. C, Lim, and M. E. Motarnedi, “Integrated Silicon microbeam PI-FET accelerometer,” IEEE Trans. Electron Devices, vol. ED-29, pp, 27–33, Jan. 1982.