A Model for the Bulk Plasma in an RF Chlorine Discharge

IEEE Transactions on Plasma Science

Volumn 14, Issue 2, 1986, Pages 103-111

  Rogoff, Gerald L ^a   Kramer, Jerry M ^a   Piejak, Robert B ^a  

^a VERIZON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE - IONIZATION; ELECTRIC DISCHARGES;

BOLTZMANN EQUATION; BULK PLASMA; RF DISCHARGES;

PLASMAS;

EID: 0022703124     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/TPS.1986.4316512     Document Type: Article

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