Al2O3 films for integrated optics

Thin Solid Films

Volumn 138, Issue 2, 1986, Pages 171-181

  Smit, M K ^a   Acket, G A ^a   van der Laan, C J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS - THIN FILMS; FILMS - MECHANICAL PROPERTIES;

CHEMO-MECHANICAL PROPERTIES; ELECTRON MICROGRAPHS;

INTEGRATED OPTICS;

EID: 0022695240     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(86)90391-3     Document Type: Article

References (17)

1. Theory of dielectric waveguides
2. Sputtered glass waveguide for integrated optical circuits
3. Barium silicate films for integrated optical circuits
4. 5
5. Optical losses of evaporation-deposited dielectric waveguides
6. Ion-beam-assisted deposition of thin films
7. Silicon nitride films on silicon for optical waveguides
8. Optical waveguides prepared by ion-beam-assisted deposition
9. 3 by modified DC planar magnetron sputtering
10. Fabrication and measurement of passive components
11. Theory of prism-film coupler and thin-film light guides
12. Theory of prism-film coupler by plane-wave analysis