An investigation of fixed charge buildup in nitrided oxides

Journal of the Electrochemical Society

Volumn 133, Issue 4, 1986, Pages 787-793

  Ruggles, G A ^a   Monkowski, J R ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR MATERIALS - TESTING; SILICON COMPOUNDS - PROCESSING;

FIXED CHARGE BUILDUP; NITRIDED OXIDES; THERMAL NITRIDATION;

SEMICONDUCTOR DEVICES, MIS;

EID: 0022693749     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2108678     Document Type: Article

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