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Volumn 33, Issue 3, 1986, Pages 409-413

Inversion-Layer Capacitance and Mobility of Very Thin Gate-Oxide MOSFET's

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MEASUREMENTS - CAPACITANCE;

EID: 0022688857     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1986.22502     Document Type: Article
Times cited : (117)

References (11)
  • 1
    • 0020781816 scopus 로고
    • Analysis of the channel inversion layer capacitance in the very thin-gate IGFET
    • S.-Y. Oh, S.-G. Choi, C. G. Sodini, and J. L. Moll, “Analysis of the channel inversion layer capacitance in the very thin-gate IGFET,” IEEE Electron Device Lett., vol. EDL-4, p. 236, 1983.
    • (1983) IEEE Electron Device Lett. , vol.EDL-4 , pp. 236
    • Oh, S.-Y.1    Choi, S.-G.2    Sodini, C.G.3    Moll, J.L.4
  • 2
    • 84941455943 scopus 로고
    • Practical limitations of gate-oxide thickness minimization in the MOS-FET
    • Y.-P. Han, J. P. Mize, B. T. Moore, J. Pinto, and R. Worley, “Practical limitations of gate-oxide thickness minimization in the MOS-FET,” IEEE Trans. Electron Devices, vol. ED-30, p. 1573, 1983.
    • (1983) IEEE Trans. Electron Devices , vol.ED-30 , pp. 1573
    • Han, Y.-P.1    Mize, J.P.2    Moore, B.T.3    Pinto, J.4    Worley, R.5
  • 4
    • 0009599273 scopus 로고
    • Characterization of the electron mobility in the inverted <100> Si surface
    • A. G. Sabnis and J. T. Chemens, “Characterization of the electron mobility in the inverted <100> Si surface,” in IEDM Tech. Dig., p. 18, 1979.
    • (1979) IEDM Tech. Dig. , pp. 18
    • Sabnis, A.G.1    Chemens, J.T.2
  • 5
    • 0018517266 scopus 로고
    • Subthreshold behavior of uniformly and nonuniformly doped long-channel MOSFET
    • J. R. Brews, “Subthreshold behavior of uniformly and nonuniformly doped long-channel MOSFET,” IEEE Trans. Electron Devices, vol. ED-26, p. 1282, 1979.
    • (1979) IEEE Trans. Electron Devices , vol.ED-26 , pp. 1282
    • Brews, J.R.1
  • 6
    • 0021640172 scopus 로고
    • Characterization of very thin gate-oxide MOS devices
    • M.-S. Liang, J. Y. Choi, P. K. Ko, and C. Hu, “Characterization of very thin gate-oxide MOS devices,” in IEDM Tech. Dig. p. 152, 1984.
    • (1984) IEDM Tech. Dig. , pp. 152
    • Liang, M.-S.1    Choi, J.Y.2    Ko, P.K.3    Hu, C.4
  • 7
    • 0019048875 scopus 로고
    • Electron mobility in inversion and accumulation layers on thermally oxidized silicon surfaces
    • S. C. Sun and J. D. Plummer, “Electron mobility in inversion and accumulation layers on thermally oxidized silicon surfaces,” IEEE Trans. Electron Devices, vol. ED-27, p. 1497, 1980.
    • (1980) IEEE Trans. Electron Devices , vol.ED-27 , pp. 1497
    • Sun, S.C.1    Plummer, J.D.2
  • 8
    • 0020186076 scopus 로고
    • Charge accumulation and mobility in thin dielectric MOS transistors
    • C. G. Sodini, T. W. Ekstedt, and J. L. Moll, “Charge accumulation and mobility in thin dielectric MOS transistors,” Solid-State Electron., vol. 25, p. 833, 1982.
    • (1982) Solid-State Electron. , vol.25 , pp. 833
    • Sodini, C.G.1    Ekstedt, T.W.2    Moll, J.L.3
  • 9
    • 0017932965 scopus 로고
    • A charge-sheet model of the MOSFET
    • J. R. Brews, “A charge-sheet model of the MOSFET,” Solid-State Electron., vol. 21, p. 345, 1978.
    • (1978) Solid-State Electron. , vol.21 , pp. 345
    • Brews, J.R.1
  • 11
    • 0020831950 scopus 로고
    • Transconductance degradation in thin-oxide MOSFET's
    • G. Baccarani and M. R. Wordeman, “Transconductance degradation in thin-oxide MOSFET's,” IEEE Electron Devices, vol. ED-30, p. 1295, 1983.
    • (1983) IEEE Electron Devices , vol.ED-30 , pp. 1295
    • Baccarani, G.1    Wordeman, M.R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.