SCOPUS 정보 검색 플랫폼

Volumn 39, Issue 2, 1986, Pages 73-82

Investigations on hydrophilic and hydrophobic silicon (100) wafer surfaces by X-ray photoelectron and high-resolution electron energy loss-spectroscopy

(2) Grundner, M a Jacob, H a

a Institute of Radiochemistry (Germany)

Author keywords

68.20; 73; 82.65

Indexed keywords

CHEMICAL REACTIONS - OXIDATION; SPECTROSCOPY, ELECTRON - APPLICATIONS;

HIGH-RESOLUTION ELECTRON ENERGY LOSS-SPECTROSCOPY; HYDROPHILIC SILICON; HYDROPHOBIC SILICON; X-RAY PHOTOELECTRON SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0022662543 PISSN: 07217250 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/BF00616822 Document Type: Article

Times cited : (424)

References (35)

1
- 0014800514
- (1970) RCA Rev. , vol.31 , pp. 187
- Kern, W.¹ Puotinen, D.A.²

2
- 0020112784
- The impact of surface analysis technology on the development of semiconductor wafer cleaning processes
- (1983) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.1 A , pp. 646
- Phillips, B.F.¹

3
- 84934666239
- D.E. Aspnes, A.A. Studna: Appl. Phys. Lett. 39, 316

4
- 0017723739
- (1977) IEEE Trans. , vol.24 , pp. 2108
- Grunthaner, F.J.¹ Maserjian, J.²

5
- 0343399317
- (1978) Electrochem. Soc. Extended Abstr. , vol.78 , Issue.1 , pp. 688
- Schwettmann, F.M.¹

6
- 84975363006
- Silicon Cleaning with Hydrogen Peroxide Solutions: A High Energy Electron Diffraction and Auger Electron Spectroscopy Study
- (1972) Journal of The Electrochemical Society , vol.119 , pp. 772
- Henderson, R.C.¹

7
- 0019698734
- (1981) Phys. Stat. Solidi (a) , vol.68 , pp. 505
- Finster, J.¹ Schulze, D.²

8
- 0016483771
- (1975) J. Electrochem. Soc. , vol.122 , pp. 413
- Raider, S.I.¹ Flitsch, R.² Palmer, M.J.³

9
- 0011328960
- (1983) Surf. Sci. , vol.128 , pp. 169
- Mende, G.¹ Finster, J.² Flamm, D.³ Schulze, D.⁴

10
- 0021003650
- (1983) Electrochem. Soc. Extended Abstr. , vol.83 , Issue.1 , pp. 413
- Matlock, J.H.¹

11
- 5244241921
- (1978) Appl. Phys. Lett. , vol.32 , pp. 379
- Stein, H.J.¹

12
- 0019622512
- (1981) Surf. Interf. Anal. , vol.3 , pp. 211
- Wagner, C.D.¹ Davis, L.E.² Zeller, M.V.³ Taylor, J.A.⁴ Raymond, R.H.⁵ Gale, L.H.⁶

13
- 48749139375
- (1984) Spectrochim. Acta , vol.39 B , pp. 637
- Ebel, M.F.¹ Zuba, G.² Ebel, H.³ Wernisch, J.⁴ Jablonski, A.⁵

14
- 0016015486
- Electron mean escape depths from x−ray photoelectron spectra of thermally oxidized silicon dioxide films on silicon
- (1975) Journal of Vacuum Science and Technology , vol.12 , pp. 305
- Flitsch, R.¹ Raider, S.I.²

15
- 84934666244
- J.H. Mazur, R. Gronsky, J. Washburn: Lawrence Berkeley Laboratory Report 16272 (1983)

16
- 0018522041
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 1443
- Grunthaner, F.J.¹ Grunthaner, P.J.² Vasquez, R.P.³ Lewis, B.F.⁴ Maserjian, J.⁵

17
- 0021177532
- (1984) Appl. Phys. Lett. , vol.44 , pp. 93
- Hollinger, G.¹ Himpsel, F.J.²

18
- 0019574354
- (1981) J. Appl. Phys. , vol.52 , pp. 4122
- Hahn, P.O.¹ Henzler, M.²

19
- 0040352606
- Wiley, New York
- (1900) The Surface Chemistry of Silica , pp. 657
- Iler, R.K.¹

20
- 0000261822
- (1976) J. Electr. Spectrosc. Rel. Phen. , vol.8 , pp. 343
- Gray, R.C.¹ Carver, J.C.² Hercules, D.M.³

21
- 84934666243
- P.O. Hahn: Private communication

22
- 84934666242
- H. Ibach: Private communication

23
- 0020203304
- (1982) Appl. Phys. , vol.29 A , pp. 113
- Ibach, H.¹ Bruchmann, H.D.² Wagner, H.³

24
- 0343677398
- (1984) Surf. Sci. , vol.139 , pp. L 209
- Schäfer, J.A.¹ Frankel, D.² Stucki, F.³ Göpel, W.⁴ Lapeyre, G.J.⁵

25
- 0000766517
- (1968) J. Phys. Chem. , vol.72 , pp. 4676
- Hertl, W.¹ Hair, M.L.²

26
- 0020127895
- (1982) Solid State Commun. , vol.42 , pp. 457
- Ibach, H.¹ Wagner, H.² Bruchmann, D.³

27
- 4243861844
- Surface cleaning of Si(100) and Ag/Si(100): Characterisation by SEM, AES and RHEED
- (1984) Surface Science , vol.137 , pp. L 92
- Hanbücken, H.¹ Neddermayer, H.² Venables, J.R.³

28
- 0012690813
- (1965) Proc. Brit. Ceram. Soc. , vol.5 , pp. 133
- Taylor, J.A.G.¹ Hockey, J.A.² Pethica, B.A.³

29
- 84934666241
- H. Beyer: Private communication

30
- 35949029886
- (1979) Phys. Rev. , vol.19 B , pp. 4292
- Galeener, F.L.¹

31
- 0542431927
- (1976) J. Non-Cryst. Solids , vol.20 , pp. 171
- Gaskell, P.H.¹ Johnson, D.W.²

32
- 0011154461
- (1982) Phys. Rev. , vol.26 B , pp. 6622
- Ching, W.Y.¹

33
- 0019587892
- (1981) Appl. Surf. Sci. , vol.8 , pp. 318
- Hollinger, G.¹

34
- 0021427329
- (1984) Solid State Commun. , vol.50 , pp. 673
- Ubara, H.¹ Imura, T.² Hiraki, A.³

35
- 0001860560
- (1967) Solid State Technol. , vol.10 , pp. 27
- Mendel, E.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.