Development of test structures for silicon particle detectors

Nuclear Inst. and Methods in Physics Research, A

Volumn 253, Issue 3, 1987, Pages 325-332

  Heijne, E H M ^a   Debusschere, I ^b   Declerck, G ^b   Vanstraelen, G ^b  

^a CERN   (Switzerland)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; RADIATION EFFECTS;

MOS CAPACITOR; MOS TEST CAPACITOR; SILICON DIODE PARTICLE DETECTORS; TEST EQUIPMENT; TEST STRUCTURES;

PARTICLE DETECTORS;

EID: 0022456977     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-9002(87)90514-6     Document Type: Article

References (7)

1. Proc. 2nd European Symp. on Electro-Optical Engineering
2. A deep-depletion CCD imager for soft X-ray, visible, and near-infrared sensing
3. 4th European Symposium on Semiconductor Detectors