TWO-DIMENSIONAL SILICON OXIDATION EXPERIMENTS AND THEORY.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1985, Pages 388-391

  Kao, Dah Bin ^a   McVittie, James P ^a   Nix, William D ^a   Saraswat, Krishna C ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON MATERIALS/DEVICES; SILICON OXIDATION;

SEMICONDUCTING SILICON;

EID: 0022334718     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)