AIR-GAP TYPE PIEZOELECTRIC COMPOSITE THIN FILM RESONATOR.

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1985, Pages 361-366

  Satoh, Hiroaki ^a   Ebata, Yasuo ^a   Suzuki, Hitoshi ^a   Narahara, Choji ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

RESONATORS - THIN FILMS;

MINIATURE RESONATORS; PIEZOELECTRIC RESONATORS; THIN-AIR GAPS; THIN-FILM DEVICE FABRICATION;

PIEZOELECTRIC DEVICES;

EID: 0022327288     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/freq.1985.200870     Document Type: Conference Paper

References (7)