DEEP-TRENCHED CAPACITOR TECHNOLOGY FOR 4 MEGABIT DYNAMIC RAM.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1985, Pages 702-705

  Yamada, K ^a   Yamabe, K ^a   Tsunashima, Y ^a   Imai, K ^a   Kashio, T ^a   Tango, H ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS;

DEEP-TRENCHED CAPACITORS; DYNAMIC RAM; RANDOM-ACCESS MEMORIES;

DATA STORAGE, DIGITAL;

EID: 0022321065     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)