STUDIES OF THIN POLY Si OXIDES FOR E AND E**2 PROM.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1985, Pages 380-383

  Ono, Takashi ^a   Mori, Tadashi ^a   Ajioka, Tsuneo ^a   Takayashiki, Tetsuya ^a  

^a OKI ELECTRIC INDUSTRY CO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON;

DIELECTRIC FILMS; POLYSILICON OXIDES; PROM; READ-ONLY MEMORIES; SILICON MATERIALS/DEVICES;

DATA STORAGE, DIGITAL;

EID: 0022291930     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)