EFFECTS OF SILICON SURFACE ORIENTATION ON SUBMICRON CMOS DEVICES.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1985, Pages 581-584

  Kinugawa, Masaaki ^a   Kakumu, Masakazu ^a   Usami, Toshiroh ^a   Matsunaga, Jun'ichi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON;

NMOS; PMOS; SUBMICRON CMOS;

SEMICONDUCTOR DEVICES, MOS;

EID: 0022291262     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/iedm.1985.191038     Document Type: Conference Paper

References (5)