1MB DRAM WITH 3-DIMENSIONAL STACKED CAPACITOR CELLS.

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 1985, Pages 250-251

  Takemae, Yoshihiro ^a   Ema, Tajii ^a   Nakano, Masao ^a   Baba, Fumio ^a   Yabu, Takashi ^a   Miyasaka, Kiyoshi ^a   Shirai, Kazunari ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE, SEMICONDUCTOR - DESIGN;

3-D STACKED CAPACITOR CELLS; MEGABIT DYNAMIC RAM;

DATA STORAGE, DIGITAL;

EID: 0022252167     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)