VOLTAGE MEASUREMENTS INSIDE INTEGRATED CIRCUITS USING MECHANICAL AND ELECTRON PROBES.

Scanning Electron Microscopy

Volumn v, Issue , 1985, Pages 1491-1500

  Plies, E ^a   Otto, J ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MEASUREMENTS - VOLTAGE; ELECTRON BEAMS - APPLICATIONS;

CIRCUIT INSPECTION; ELECTRON PROBE; MECHANICAL PROBE; WAVEFORM MEASUREMENT;

INTEGRATED CIRCUIT TESTING;

EID: 0022242143     PISSN: 05865581     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (20)