Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films

Journal of the Electrochemical Society

Volumn 132, Issue 11, 1985, Pages 2677-2685

  Papa, L E ^b   Schnoes, K J ^a   Brasen, D ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE - MANUFACTURE; RUTHENIUM COMPOUNDS - VAPOR DEPOSITION;

DAMAGE-FREE DEPOSITION; ORGANORUTHENIUM COMPLEXES;

RUTHENIUM AND ALLOYS;

EID: 0022162031     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2113647     Document Type: Article

References (21)

1. D. J. Pedder, “Electrical Components Science and Technology, ” Vol. 2, pp. 259–261, Gordon and Breach, Ltd., New York (1976).
2. R. G. Vadimsky, R. P. Frankenthal, and D. E. Thompson, This Journal, 126, 2017 (1979).
3. R. D. Lanam and A. R. Robertson, Res. Dev., 102 (1984).
4. V. B. Lazarev and I. S. Shapylgin, Russ.J. Inorg. Chem., 23, 163 (1978).
5. J. N. Crosby and R. S. Hanley, U.S. Pat. 4, 250, 210 (1981).
6. J. C. Viguie and J. Spitz, This Journal, 122, 585 (1975).
7. D. R. Rolison, K. Kuo, M. Umana, D. Brundage, and R. W. Murray, This Journal, 126, 407 (1979).
8. T. A. Palumbo, Plating Surf. Finish., 66, 42 (1979).
9. G. A. Augis and L. L. Hines, IEEE Trans. Comp. Hyb. Manu. Tech., chmt-1, 46 (1978).
10. M. C. Canart-Martin, Y. Canivez, R. Declercq, L. D. Laude, and M. Wautelet, Thin Solid Films, 92, 323 (1982).
11. C. R. Eady, B. F. G. Johnson, and J. Lewis, J. Organometal. Chem., 37, C39 (1972).
12. J. Muller and L. D'Or, J. Organometal. Chem., 10, 313 (1967).
13. W. D. Reents, Jr., Unpublished results.
14. L. E. Davis et al., “Handbook of Auger Electron Spectroscopy, ” Perkin-Elmer, Eden Prairie, MN (1978).
15. N. E. Miller and I. Beinglass, Solid State Technol., 25 (12), 85 (1982).
16. P. A. Gargini, Ind. Res. Dev., 25 (3), 141 (1983).
17. M. L. Green and R. A. Levy, This Journal, 132, 1243 (1985).
18. S. K. Tung and R. E. Caffrey, This Journal, 114, 275C (1967).
19. S. P. Murarka, J. Vac. Sci. Technol., 17, 775 (1980).
20. E. A. Brandes, “Smithells Metals Reference Book, ” Chap. 8, Butterworths, London (1983).
21. D. B. Fraser, in “VLSI Technology, ” S. M. Sze, Editor, Chap. 9, McGraw-Hill, New York (1983).