UNLOCKING THE POTENTIAL OF BETA SILICON CARBIDE.

Solid State Technology

Volumn 28, Issue 11, 1985, Pages 133-139

  Parsons, J D ^a   Bunshah, R F ^a   Stafsudd, O M ^a  

^a Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS - MATERIALS; SILICON CARBIDE - APPLICATIONS;

BETA SILICON CARBIDE; EPITAXIAL GROWTH; SINGLE CRYSTAL;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0022160958     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (59)