On the Parasitic Capacitances of Multilevel Parallel Metallization Lines

IEEE Transactions on Electron Devices

Volumn 32, Issue 11, 1985, Pages 2408-2414

  Taylor, Clayborne D ^a   Elkhouri, George N ^a   Wade, Thomas E ^a  

^a MISSISSIPPI STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MEASUREMENTS - CAPACITANCE;

METALLIZATION LINES; PARASITIC CAPACITANCE;

INTEGRATED CIRCUITS, VLSI;

EID: 0022151724     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1985.22287     Document Type: Article

References (14)

1. T. Sakurai and K. Tamaru, “Simple formulas for two- and three-di-mensional capacitances,” IEEE Trans. Electron Devices, vol. ED-30, pp. 183–185, Feb. 1983.
2. P. E. Cotrell, E. M. Buturda, and D. R. Thomas, “Multidimensional simulation of VLSI wiring capacitance,” in IEDM Tech. Dig., pp. 548–551, 1982.
3. W. H. Chang, “Analytical IC metal-line capacitance formulas,” IEEE Trans. Microwave Theory Tech., vol. MTT-24, pp. 608–611, Sept. 1976; see also vol. MTT-25, p. 712, Aug. 1977.
4. A. E. Ruehli and P. A. Breennan, “Capacitance models for integrated circuit metallization wires,” IEEE J. Solid-State Circuits, vol. SC-10, no. 6, pp. 530–536, Dec. 1975.
5. A. E. Ruehli and P. A. Brennan, “Accurate metallization capacitances for integrated circuits and packages,” IEEE J. Solid-State Circuits, vol. SC-8, pp. 289–290, Aug. 1973.
6. P. D. Patel, “Calculation of capacitance coefficients for a system of irregular finite conductors on a dielectric sheet,” IEEE Trans. Microwave Theory Tech., vol. MTT-19, pp. 862–869, Nov. 1971.
7. W. T. Weeks, “Calculation of capacitance coefficients of multicon-ductor transmission lines in the presence of a dielectric interface,” IEEE Trans. Microwave Theory Tech., vol. MTT-18, pp. 35–43, Jan. 1970.
8. M. V. Schneider, “Computation of impedance and attenuation of TEM-lines by finite difference methods,” IEEE Trans. Microwave Theory Tech., vol. MTT-13, pp. 793–800, Nov. 1965.
9. J. W. Duncan, “The accuracy of the finite-difference solutions of La-place's equation,” IEEE Trans. Microwave Theory Tech., vol. MTT-15, pp. 575–581, Oct. 1967.
10. G. E. Forsythe and W. R. Wasow, Finite-Difference Methods for Partial Differential Equations. New York: Wiley, 1960.
11. R. P. Tewarson, Sparse Matrices. New York: Academic, 1973.
12. S. Seely and A. D. Poularikas, Electromagnetics Classical and Modern Theory and Applications. New York: Marcel Dekker, 1979.
13. C. D. Taylor, G. N. Elkhouri, and T. E. Wade, “Parasitic capacitances between skewed conductors,” accepted for publication in the IEEE Trans. Electron Devices.
14. S. Ramo, J. R. Whinnery, and T. Van Duzer, Fields and Waves in Communication Electronics. New York: Wiley, 1965, p. 444.