The inductively coupled r.f. (radio frequency) plasma

Pure and Applied Chemistry

Volumn 57, Issue 9, 1985, Pages 1321-1352

  Boulos, Maher I ^a  

^a UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS - APPLICATIONS; ELECTRIC FIELDS; MAGNETIC FIELDS; MATHEMATICAL MODELS;

'HYBRID PLASMA' TORCH; ARGON PLASMA; INDUCTION PLASMA TORCH; INDUCTIVELY-COUPLED PLASMAS; PLASMA-PARTICLE INTERACTION EFFECT;

PLASMAS;

EID: 0022129173     PISSN: 00334545     EISSN: 13653075     Source Type: Journal    
DOI: 10.1351/pac198557091321     Document Type: Article

References (93)

1. Babat, G.I., J. Inst. Elec. Eng., London, 94, 27 (1947).
2. Reed, T.B., J. Appl. Phys., 32, 821 (1961).
3. Eckert, H.U., High Temperature Science, 99 (1974).
4. Davies, J. and P. Simpson, “Induction heating Handbook”, McGraw Hill (1979).
5. Freeman, M.P. and Chase, J.D., J. of Appl. Physics, 39, 180 (1968).
6. Thorpe, M.L., and Scammon, L.W., “Induction plasma heating; high power, low frequency operation and pure hydrogen heating”, TAFA final report under contract agreement #NSAU 3–9375 (1968).
7. Eckert, H.U., J. Appl. Phys., 41, 1520 (1970).
8. Mensing, A.E. and Boedeker, L.R., Theoretical investigations of R.F., induction heated plasmas”, NASA CR-1312 (1969).
9. Vogel, C.E., Pool, J.W. and P. Dundas, “Radiation measurements and low frequency and high pressure investigations of inductin heated plasma”, NASA CR-1804 (1971).
10. Pool, J.W., Freeman, M.P. Doak, K.W. and M.L. Thorpe, “Simulator tests to study hot-flow problems related to a gas core reactor”. NASA CR-2309 (1973).
11. Yoshida, T., T. Tani, H. Nishimura and K. Akashi, J. Appl. Phys., 54, 640 (1983).
12. Hollabaugh, C.M., D.E. Hull, L.R. Newkirk and J.J. Petrovic, J. Mat. Sci, 18, 3190 (1983).
13. Eckert, H.U., J. Appl. Phys., 42, 3108 (1971).
14. Trekhov, E.S., Fomenko, A.F. and Khoshev, Yu, M., Teplofiz. Vys. Temp., 7, 860 (1969).
15. Eckert, H.U., J. Appl. Phys., 43, 2707 (1972).
16. Johnston, P.D., Brit. J. Appl. Phys., 1, 479 (1968).
17. Kleinmann, I. and Cajko, J., Spectrochim. Acta, 25B, 657 (1970).
18. Dresvin, S.V. and Klubnikin, V.S., Teplofiz. Vys. Temp., 475 (1971).
19. Dymshits, B., Koretskiy, Ya. P., z. Tekhn Fiz., 34, 1677 (1964).
20. Goldfarb, V. and Dresvin, S.V., Toplofiz. Vys Temp., 3, 333 (1965).
21. Hughes, D.W., Wooding, E.R., Phys. Lett., A42, 1 (1967).
22. Vurgel’, F.B. et al. Low Temperature Plasma, Edited by A. Ye Sheydlin, Moscow, Mir (1967).
23. Consoli, J., Proc. VI Intern. Conf. Ioniz. Phen. in Gases, Paris (1963).
24. Donskoi, A.V., Goldfarb, V.M. and Klubnikin, V.S., “Physics and Technology of lowtemperature plasmas. S.V. Dresvin, Ed. (1972). English edition translated by T. Cheron and edited by H.U. Eckert. Iowa State University press (1977).
25. Goldfarb, V.M. et al., Teplofiz Vys. Temp., 5, #4 (1967).
26. Goldfarb, V.M. et al., Proc. XIV Coll. Sprectrosc. Intern. Debrecin, Hungary, p. 751 (1967).
27. Goykhman, V. Kh et al. Proc. I. Allunion Conf. Phys. Low-temp, plasma, Kiev, Nankova Dumka, p. 33 (1966).
28. Chase, J.D.J. Appl. Phys., 42, 4870 (1971).
29. Klubnikin, V.S., Teplofiz Vys. Temp., 13, 473 (1975). High Temp., 13, 439 (1975).
30. Dresvin, S.V., and Kh. El’-Mikati, Teplofiz Vys. Temp., 15, 11 58 (1977).
31. Waldie, B. and R. Hancock, Trans. I. Chem. Eng., 56, 178 (1978).
32. Desai, S.V., E.S. Daniel, and W.H. Corcoran, Rev. Sci., Inst., 39, 612 (1968).
33. Meubus, P., Can J. Ch. Eng., 52, 616 (1974).
34. Gold, D., J. of Phys., 10, 395 (1977).
35. Gouesbet, G., C.R. Acad. Sc. Paris, 280B, 597 (1975).
36. Gouesbet, G. and M. Trinite, Letters in Heat & Mass Transfer, 141 (1977).
37. Lesinski, J., Gagné, R. and M.I. Boulos, 5th International Symposium on Plasma Chemistry, Edinburgh, U.K., August 10–14 2, 527 (1981).
38. Dundas, P.H., Induction plasma heating: measurement of gas concentrations, temperatures and stagnation heads in a binary plasma system. NASA CR-1527 (1970).
39. Eckert, H.U., J. Appl. Phys., 41, 1529 (1970).
40. Pridmore-Brown, D.C., J. Appl. Phys., 41, 3621 (1970).
41. Keefer, D.R., J.A. Sprouse and F.C. Lper, IEEE, Tran. Pl. Sc., PS-1, 71 (1973).
42. Eckert, H.U., Proceedings of the Internati nal Winter Conference, San Juan, Puerto Rico, Jan 7–11 (1980), Hyden Press, 35 (1981).
43. Eckert, H.U., 5th International Symposium on Plasma Chemistry, Edinburgh, U.K., 10–14 August, p. 781 (1981).
44. Aeschbach, F., “Computed electron density distribution in an inductively- coupled plasma discharge in Argon”, ICP Informatin Newsletter, 6, 272–287 (1980).
45. Miller, R.J. and J.R. Ayen, J. Appl. Phys., 40, 5260 (1969).
46. Barnes, R.M. and R.G. Schleicher, Spectrochim. Acta, B30, 109 (1975).
47. Barnes, R.M. and S. Nikdel, Appl. Spectrosc., 29, 477 (1975).
48. Barnes, R.M. and S. Nikdel, J. Appl. Phys., 47, 3929 (1976).
49. Delettrez, J.A., “A numerical calculation of the flow and electrical characteristics of an argon induction discharge”, Ph.D. Dissertatin, University of California, Davis (1974).
50. Boulos, M.I., IEEE, Trans, on Plasma Sc., PS-4, 28 (1976).
51. Boulos, M.I., R. Gagné and R.M. Barnes, C.J. Ch.E., 58, 367 (1980).
52. Gagné, R., “Etude de modélisation d'un plasma à induction généré a haute fréquence”, M. Sc.A. Thesis, University of Sherbrooke, Québec (1970).
53. Mostaghimi, J., Proulx, P. and M.I. Boulos, J. Numerical H.T., 8, 187 (1985).
54. Mostaghimi, J., Proulx, P. and M.I. Boulos, J. Plasma Chemistry and Plasma Processing, 4, 129 (1984).
55. Patankar, S.V., “Numerical Heat Transfer and fluid flow”, McGraw Hill, N.Y. (1980).
56. Genna, J.L., R.M. Barnes and C.O. Allemand, Anal. Chem., 49, 1450 (1977).
57. Boulos, M.I. and W.H. Gauvin, C.J. Ch.E., 52, 355 (1974).
58. Bhattacharya, D. and W.H. Gauvin, AIChEJ, 21, 879 (1975).
59. Gal-Or, B., J. of Eng. for Power, 102, 589 (1980).
60. Fiszdon, J.K., Int. J. Heat & Mass Transfer, 22, 749 (1979).
61. Vardelle, M., A. Vardelle, P. Fauchais and M.I. Boulos, AIChEJ, 29, 236 (1983).
62. Wei, D., S.M. Correa, D. Apelian and M. Paliwal, 6th International Symposium on Plasma Chemistry (ISPC-6), Montreal, J, 83 (1983).
63. Boulos, M.I., IEEE, Trans. Pl. Sc., PS-6, 93 (1978).
64. Yoshida, T. and K. Akashi, J. Appl. Phys., 48, 2252 (1977).
65. Proulx, P., “Interactin plasma-particules dans la modélisation des plasmas à induction”, mémoire de M. Sc.A., Université de Sherbrooke, avril (1984).
66. Proulx, P.J. Mostaghimi and M.I. Boulos, 6th International Symposium on Plasma Chemistry, Montreal, July (1983), 1, p. 59 (1983).
67. Mostaghimi, J., Proulx, P., M.I. Boulos et R.M. Barnes, Sprectrochemical Acta, 40B, 153 (1985).
68. Proulx, P., Mostaghimi, J. and M.I. Boulos, “Plasma-particle interaction effects in induction plasma modelling under dense loading conditions”, Int. J. Heat & Mass Transfer, in print (1985).
69. Bourdin, E., P. Fauchais and M.I. Boulos, Int. J.H. & M.T., 26, 567 (1983).
70. Xi Chen and E. Pfender, Plasma Chemistry and Plasma Processing, 2, 293 (1982).
71. Ibid, 2, 185 (1982).
72. Ibid, 3, 97 (1983).
73. Ibid, 3, 351 (1983).
74. Crowe, C.T., M.P. Sharma, D.E. Stock, J. Fluids Eng., 99, 325 (1977).
75. Mostaghimi, J., E. Pfender, Plasma Chemistry and Plasma Processing, 199 (1984).
76. Reed, T.B., High Frequency floating review, 1, 6 (1961).
77. Donskoi, A.V., Dresvin, S.V., Voronin, K.K. and Volynets, F.K., Teplofiz. Vys. Temps. 3, 627 (1965).
78. Chase J.D. and Van Ruyven L.V., J. Crystal Growth, 294 (1969).
79. Poole, J.W. and Vogel, Ch. E., NASA Contract Report, CR-1765 (1971).
80. Jurewicz, J., R. Kaczmarek and M.I. Boulos, ISPC-7, Eindhoven, July 1–5 (1985).
81. Johnson, D.L. and J.S. Kim, Mat. Sci. Monographs, Elsevier S. Pub. Co., 14, 573 (1982).
82. Kim, J.S., and D.L. Johnson, Ceramic Bull., 62, 620 (1983).
83. Johnson, D.L. and J.S. Kim, Mat. Sci. Monographs, Elsevier S. Pub. Co., 14, 573 (1982).
84. Nassau, K. and J.W. Shiever, Ceramic Bull, 54-, 1004 (1975).
85. Rykalin, N.N., Pure & Appl. Chem., 48, 1 79 (1976).
86. Yoshida, T. and K. Akashi, Trnas. Japan Inst, of Metals, 22, 371 (1981).
87. Yoshida, T., Endo., K. Saito, and K. Akashi, ISPC-6, Montreal, paper #A-7–3, July (1983).
88. Canteloup, J. and A. Mocellin, J. Special Ceramics, 6, 209 (1975).
89. J. Material Sci., Letters, 2352 (1976).
90. Barnes, R.M., “Recent advances in emission spectroscopy”, CRC Critical reviews, 203 (1978).
91. Thompson, M. and J.N. Walsh, “A handbook of inductively coupled plasma spectrometry”, Blackie & Son Ltd. (1983).
92. Trassy, C. and J.M. Mermet, “Les applications analytiques des plasmas hf”, Lavoisier, Paris (1984).
93. Boumans, P. Ed., “Analysis by Inductively Coupled Plasma Atomic Emission Spectrometry”, J. Wiley, in print (1985).