Smart sensors: when and where?

Sensors and Actuators

Volumn 8, Issue 1, 1985, Pages 39-48

  Middelhoek, S ^a   Hoogerwerf, A C ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; SEMICONDUCTING SILICON - APPLICATIONS; SIGNAL PROCESSING;

SILICON SENSOR; SMART SENSORS;

SENSORS;

EID: 0022127353     PISSN: 02506874     EISSN: None     Source Type: Journal    
DOI: 10.1016/0250-6874(85)80023-8     Document Type: Article

References (24)

1. Three-dimensional representation of input and output transducers
2. Signal conversion in solid-state transducers
3. Silicon micro-transducers
4. Experimental results on an integrated strip detector with CCD-readout
5. Silicon diaphragm pressure sensors
6. Quantitative analysis of effects causing nonlinear position response in position sensitive photodetectors
7. Monolithic integrated dirction-sensitive flow sensor
8. A low power easy-to-calibrate temperature transducer
9. The Seebeck effect in silicon ICs
10. Magnetic field vector sensor based on a two-collector transistor structure
11. Integrated magnetic sensor
12. A classification of chemically sensitive semiconductor devices
13. Hydrogen sensitive MOS structures
14. Sensors for microprocessor-based applications
15. A novel method for reducing the offset of magnetic-field sensors
16. Monolithic integration of a metal—semiconductor—metal photodiode and a GaAs preamplifier
17. Miniature piezoresistive strain and pressure sensors with on-chip circuitry
18. A new integrated capacitive pressure sensor with frequency modulated output
19. Integrated silicon PI-FET accelerometer with proof mass
20. Sensors in silicon
21. Integrated magnetic sensor
22. CMOS multiplex circuit for multiple pH sensors